Wijesundara, Muthu B.J.
Silicon Carbide Microsystems for Harsh Environments
1. Introduction
Muthu B. J. Wijesundara, Robert G. Azevedo
2. SiC Materials and Processing Technology
Muthu B. J. Wijesundara, Robert G. Azevedo
3. Silicon Carbide Electronics
Muthu B. J. Wijesundara, Robert G. Azevedo
4. SiC MEMS devices
Muthu B. J. Wijesundara, Robert G. Azevedo
5. Packaging
Muthu B. J. Wijesundara, Robert G. Azevedo
6. System Integration
Muthu B. J. Wijesundara, Robert G. Azevedo
Keywords: Engineering, Electronics and Microelectronics, Instrumentation, Circuits and Systems, Nanotechnology and Microengineering
- Author(s)
- Wijesundara, Muthu B.J.
- Azevedo, Robert
- Publisher
- Springer
- Publication year
- 2011
- Language
- en
- Edition
- 1
- Series
- MEMS Reference Shelf
- Page amount
- 15 pages
- Category
- Technology, Energy, Traffic
- Format
- Ebook
- eISBN (PDF)
- 9781441971210