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Gupta, Tapan

Copper Interconnect Technology

Gupta, Tapan - Copper Interconnect Technology, ebook

148,80€

Ebook, PDF with Adobe DRM
ISBN: 9781441900760
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Table of contents

2. Introduction
Tapan Gupta

3. Dielectric Materials
Tapan Gupta

4. Diffusion and Barrier Layers
Tapan Gupta

5. Pattern Generation
Tapan Gupta

6. Deposition Technologies of Materials for Cu-Interconnects
Tapan Gupta

7. The Copper Damascene Process and Chemical Mechanical Polishing
Tapan Gupta

8. Conduction and Electromigration
Tapan Gupta

9. Routing and Reliability
Tapan Gupta

Keywords: Engineering, Electronics and Microelectronics, Instrumentation, Optical and Electronic Materials, Circuits and Systems, Nanotechnology

Author(s)
Publisher
Springer
Publication year
2009
Language
en
Edition
1
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (PDF)
9781441900760

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