Bourell, David
Micromanufacturing
Table of contents
1. Introduction
Richard E. DeVor, Kornel F. Ehmann
2. Design
Martin L. Culpepper, Thomas R. Kurfess
3. Materials
David Bourell, Kamlakar Rajurkar
4. Processes
Kamlakar Rajurkar, Marc Madou
5. Metrology, Sensors and Control
Thomas R. Kurfess, Thom J. Hodgson
6. Non-lithography Applications
Marc Madou
7. Business, Education, the Environment, and Other Issues
Thom J. Hodgson
DRM-restrictions
Printing: not available
Clipboard copying: not available
- Author(s)
- Bourell, David
- Culpepper, Martin L.
- Devor, Richard
- Ehmann, Kornel F.
- Hodgson, Thom J.
- Kurfess, Thomas R.
- Madou, Marc
- Rajurkar, Kamlakar
- Publisher
- Springer
- Publication year
- 2007
- Language
- en
- Edition
- 1
- Category
- Technology, Energy, Traffic
- Format
- Ebook
- eISBN (PDF)
- 9781402059490
