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Chiang, Charles C.

Design for Manufacturability and Yield for Nano-Scale CMOS

Chiang, Charles C. - Design for Manufacturability and Yield for Nano-Scale CMOS, ebook

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Ebook, PDF with Adobe DRM
ISBN: 9781402051883
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Table of contents

1. Introduction
Charles C. Chiang, Jamil Kawa

2. Random Defects
Charles C. Chiang, Jamil Kawa

3. Systematic Yield - Lithography
Charles C. Chiang, Jamil Kawa

4. Systematic Yield - Chemical Mechanical Polishing (CMP)
Charles C. Chiang, Jamil Kawa

5. Variability & Parametric Yield
Charles C. Chiang, Jamil Kawa

6. Design for Yield
Charles C. Chiang, Jamil Kawa

7. Yield Prediction
Charles C. Chiang, Jamil Kawa

8. Conclusions
Charles C. Chiang, Jamil Kawa

Keywords: Engineering, Circuits and Systems, Electronics and Microelectronics, Instrumentation, Computer-Aided Engineering (CAD, CAE) and Design, Processor Architectures, Software Engineering/Programming and Operating Systems, Nanotechnology

Author(s)
 
Publisher
Springer
Publication year
2007
Language
en
Edition
1
Series
Series on Integrated Circuits and Systems
Page amount
281 pages
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (PDF)
9781402051883

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