Dziuban, Jan A.
Bonding in Microsystem Technology
Table of contents
1. Introduction
2. Some Remarks on Microsystem Systematics and Development
3. Deep, Three-Dimensional Silicon Micromachining
4. Bonding
5. Classification of Bonding and Closing Remarks
DRM-restrictions
Printing: not available
Clipboard copying: not available
- Author(s)
- Dziuban, Jan A.
- Publisher
- Springer
- Publication year
- 2006
- Language
- en
- Edition
- 1
- Category
- Technology, Energy, Traffic
- Format
- Ebook
- eISBN (PDF)
- 9781402045899
