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Dziuban, Jan A.

Bonding in Microsystem Technology

Dziuban, Jan A. - Bonding in Microsystem Technology, ebook

155,00€

Ebook, PDF with Adobe DRM
ISBN: 9781402045899
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Table of contents

1. Introduction

2. Some Remarks on Microsystem Systematics and Development

3. Deep, Three-Dimensional Silicon Micromachining

4. Bonding

5. Classification of Bonding and Closing Remarks

DRM-restrictions

Printing: not available
Clipboard copying: not available

Keywords: TECHNOLOGY & ENGINEERING / General TEC000000

Author(s)
Publisher
Springer
Publication year
2006
Language
en
Edition
1
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (PDF)
9781402045899

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