Materials Fundamentals of Gate Dielectrics

1. Materials and Physical Properties of High-K Oxide Films
Ran Liu

2. Device Principles of High-K Dielectrics
Kurt Eisenbeiser

3. Thermodynamics of Oxide Systems Relevant to Alternative Gate Dielectrics
Alexandra Navrotsky, Sergey V. Ushakov

4. Electronic Structure and Chemical Bonding in High-k Transition Metal and Lanthanide Series Rare Earth Alternative Gate Dielectrics: Applications to Direct Tunneling and Defects at Dielectric Interfaces
Gerald Lucovsky

5. Atomic Structure, Interfaces and Defects of High Dielectric Constant Gate Oxides
J. Robertson, P.W. Peacock

6. Dielectric Properties of Simple and Complex Oxides from First Principles
U.V. Waghmare, K.M. Rabe

7. IVb Transition Metal Oxides and Silicates: An Ab Initio Study
Gian-Marco Rignanese

8. The Interface Phase and Dielectric Physics for Crystalline Oxides on Semiconductors
Rodney Mckee

9. Interfacial Properties of Epitaxial Oxide/Semiconductor Systems
Y. Liang, A.A. Demkov

10. Functional Structures
Matt Copel

11. Mechanistic Studies of Dielectric Growth on Silicon
Martin M. Frank, Yves J. Chabal

12. Methodology for Development of High-? Stacked Gate Dielectrics on III–V Semiconductors
Matthias Passlack

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Keywords: SCIENCE / Physics SCI055000