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Bao, Haifei

Measurement Technology for Micro-Nanometer Devices

Bao, Haifei - Measurement Technology for Micro-Nanometer Devices, ebook

155,00€

Ebook, ePUB with Adobe DRM
ISBN: 9781118717998
DRM Restrictions

Printing106 pages with an additional page accrued every 7 hours, capped at 106 pages
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A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale

• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
• Companion website includes Lab View soft, micro-vision system test software, and algorithm software, enhancing the learning experience

Keywords:

micro-nano device measuring technology, micro-nano devices online testing, dynamic testing, typical devices testing, Lab View soft, micro-vision system test software, automatic extraction of infrared light interference fringes, micro-nano structure three-dimensional morphology reconstruction algorithm software, computer precise synchronization control, image pre-processing, in-plane motion measurement and off-plane motion measurement software, test software, overall mechanical properties, characterizing MEMS/NEMS devices

, MEMS and Nanoelectronics
Author(s)
 
 
 
 
 
 
 
 
Publisher
John Wiley and Sons, Inc.
Publication year
2016
Language
en
Edition
1
Page amount
352 pages
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (ePUB)
9781118717998
Printed ISBN
9781118717967

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