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Defa?, Emmanuel

Ferroelectric Dielectrics Integrated on Silicon

Defa?, Emmanuel - Ferroelectric Dielectrics Integrated on Silicon, ebook

193,40€

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ISBN: 9781118602805
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This book describes up-to-date technology applied to high-K materials for More Than Moore applications, i.e. microsystems applied to microelectronics core technologies.
After detailing the basic thermodynamic theory applied to high-K dielectrics thin films including extrinsic effects, this book emphasizes the specificity of thin films. Deposition and patterning technologies are then presented. A whole chapter is dedicated to the major role played in the field by X-Ray Diffraction characterization, and other characterization techniques are also described such as Radio frequency characterization. An in-depth study of the influence of leakage currents is performed together with reliability discussion. Three applicative chapters cover integrated capacitors, variables capacitors and ferroelectric memories. The final chapter deals with a reasonably new research field, multiferroic thin films.

Keywords: Dielectrics & Electric Insulators

Author(s)
Publisher
John Wiley and Sons, Inc.
Publication year
2011
Language
en
Edition
1
Series
ISTE
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (ePUB)
9781118602805
Printed ISBN
9781848213135

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