Secondary Ion Mass Spectrometry: An Introduction to Principles and Practices

Serves as a practical reference for those involved in Secondary Ion Mass Spectrometry (SIMS)
•Introduces SIMS along with the highly diverse fields (Chemistry, Physics, Geology and Biology) to it is applied using up to date illustrations
•Introduces the accepted fundamentals and pertinent models associated with elemental and molecular sputtering and ion emission
•Covers the theory and modes of operation of the instrumentation used in the various forms of SIMS (Static vs Dynamic vs Cluster ion SIMS)
•Details how data collection/processing can be carried out, with an emphasis placed on how to recognize and avoid commonly occurring analysis induced distortions
•Presented as concisely as believed possible with All sections prepared such that they can be read independently of each other

Keywords: Secondary Ion Mass Spectrometry, Surface Analysis, Materials Analysis, Isotopic distribution analysis, elemental distribution analysis, molecular distribution analysis, Thin Films, Surfaces & Interfaces, Semiconductors, Thin Films, Surfaces & Interfaces, Semiconductors