Reinhardt, Karen A.
Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals and Applications
From the Reviews...
"This handbook will be a valuable resource for many academic libraries. Many engineering librarians who work with a variety of programs (including, but not limited to Materials Engineering) should include this work in their collection. My recommendation is to add this work to any collection that serves a campus with a materials/manufacturing/electrical/computer engineering programs and campuses with departments of physics and/or chemistry with large graduate-level enrollment."
—Randy Wallace, Department Head, Discovery Park Library, University of North Texas
- Author(s)
- Reinhardt, Karen A.
- Reidy, Richard F.
- Publisher
- John Wiley and Sons, Inc.
- Publication year
- 2010
- Language
- en
- Edition
- 1
- Series
- Wiley-Scrivener
- Page amount
- 590 pages
- Category
- Technology, Energy, Traffic
- Format
- Ebook
- eISBN (ePUB)
- 9781118099513
- Printed ISBN
- 9780470625958