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Reinhardt, Karen A.

Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals and Applications

Reinhardt, Karen A. - Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals and Applications, ebook

247,00€

Ebook, ePUB with Adobe DRM
ISBN: 9781118099513
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Printing30 pages with an additional page accrued every day, capped at 30 pages
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This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physics associated with wet etching and wet cleaning is reviewed, plus the surface and colloidal aspects of wet processing. Formulation development practices and methodology are presented along with the applications for preventing copper corrosion, cleaning aluminum lines, and other sensitive layers. This is a must-have reference for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing.

From the Reviews...

"This handbook will be a valuable resource for many academic libraries. Many engineering librarians who work with a variety of programs (including, but not limited to Materials Engineering) should include this work in their collection. My recommendation is to add this work to any collection that serves a campus with a materials/manufacturing/electrical/computer engineering programs and campuses with departments of physics and/or chemistry with large graduate-level enrollment."
Randy Wallace, Department Head, Discovery Park Library, University of North Texas

Author(s)
 
Publisher
John Wiley and Sons, Inc.
Publication year
2010
Language
en
Edition
1
Series
Wiley-Scrivener
Page amount
590 pages
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (ePUB)
9781118099513
Printed ISBN
9780470625958

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