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Mack, Chris

Fundamental Principles of Optical Lithography: The Science of Microfabrication

Mack, Chris - Fundamental Principles of Optical Lithography: The Science of Microfabrication, ebook

178,60€

Ebook, ePUB with Adobe DRM
ISBN: 9781119965077
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The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components.

By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate.

This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter.

Keywords: TECHNOLOGY & ENGINEERING / Material Science TEC021000

Author(s)
Publisher
John Wiley and Sons, Inc.
Publication year
2008
Language
en
Edition
1
Page amount
534 pages
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (ePUB)
9781119965077
Printed ISBN
9780470018934

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