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Li, Yuzhuo

Microelectronic Applications of Chemical Mechanical Planarization

Li, Yuzhuo - Microelectronic Applications of Chemical Mechanical Planarization, ebook

157,80€

Ebook, PDF with Adobe DRM
ISBN: 9780470180891
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Printing195 pages with an additional page accrued every 4 hours, capped at 195 pages
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An authoritative, systematic, and comprehensive description of current CMP technology

Chemical Mechanical Planarization (CMP) provides the greatest degree of planarization of any known technique. The current standard for integrated circuit (IC) planarization, CMP is playing an increasingly important role in other related applications such as microelectromechanical systems (MEMS) and computer hard drive manufacturing. This reference focuses on the chemical aspects of the technology and includes contributions from the foremost experts on specific applications. After a detailed overview of the fundamentals and basic science of CMP, Microelectronic Applications of Chemical Mechanical Planarization:

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Provides in-depth coverage of a wide range of state-of-the-art technologies and applications

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Presents information on new designs, capabilities, and emerging technologies, including topics like CMP with nanomaterials and 3D chips

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Discusses different types of CMP tools, pads for IC CMP, modeling, and the applicability of tribometrology to various aspects of CMP

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Covers nanotopography, CMP performance and defect profiles, CMP waste treatment, and the chemistry and colloidal properties of the slurries used in CMP

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Provides a perspective on the opportunities and challenges of the next fifteen years

Complete with case studies, this is a valuable, hands-on resource for professionals, including process engineers, equipment engineers, formulation chemists, IC manufacturers, and others. With systematic organization and questions at the end of each chapter to facilitate learning, it is an ideal introduction to CMP and an excellent text for students in advanced graduate courses that cover CMP or related semiconductor manufacturing processes.

Author(s)
Publisher
John Wiley and Sons, Inc.
Publication year
2007
Language
en
Edition
1
Page amount
650 pages
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (PDF)
9780470180891
Printed ISBN
9780471719199

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