Baklanov, Mikhail
Dielectric Films for Advanced Microelectronics
This book presents an in-depth overview of the novel developments made by the scientific leaders in the area of modern dielectric films for advanced microelectronic applications. It contains clear, concise explanations of material science of dielectric films and their problem for device operation, including high-k, low-k, medium-k dielectric films and also specific features and requirements for dielectric films used in the packaging technology. A broad range of related topics are covered, from physical principles to design, fabrication, characterization, and applications of novel dielectric films.
Keywords: TECHNOLOGY & ENGINEERING / Material Science TEC021000
- Author(s)
- Baklanov, Mikhail
- Green, Martin
- Maex, Karen
- Publisher
- John Wiley and Sons, Inc.
- Publication year
- 2007
- Language
- en
- Edition
- 1
- Series
- Wiley Series in Materials for Electronic & Optoelectronic Applications
- Page amount
- 508 pages
- Category
- Technology, Energy, Traffic
- Format
- Ebook
- eISBN (PDF)
- 9780470065419
- Printed ISBN
- 9780470013601