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Fujiwara, Hiroyuki

Spectroscopic Ellipsometry: Principles and Applications

Fujiwara, Hiroyuki - Spectroscopic Ellipsometry: Principles and Applications, ebook

151,80€

Ebook, PDF with Adobe DRM
ISBN: 9780470060186
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Printing116 pages with an additional page accrued every 7 hours, capped at 116 pages
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Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

Keywords: TECHNOLOGY & ENGINEERING / Material Science TEC021000

Author(s)
Publisher
John Wiley and Sons, Inc.
Publication year
2007
Language
en
Edition
1
Page amount
388 pages
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (PDF)
9780470060186
Printed ISBN
9780470016084

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