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Lang, Jeffrey

Multi-Wafer Rotating MEMS Machines

Lang, Jeffrey - Multi-Wafer Rotating MEMS Machines, ebook

161,20€

Ebook, PDF with Adobe DRM
ISBN: 9780387777474
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Table of contents

1. Introduction to PowerMEMS
Alan H. Epstein

2. System Design Considerations and Device Overview
Alan H. Epstein

3. Materials, Structures and Packaging
S. Mark Spearing

4. Microengine Fabrication
Hanqing Li, Martin Schmidt

5. Fabrication of Microscale Rotating Magnetic Machines
David P. Arnold, Mark G. Allen

6. High-Speed Gas Bearings for Micro-Turbomachinery
Zoltán S. Spakovszky

7. Thermofluidics and Turbomachinery
Stuart A. Jacobson

8. Motors and Generators
Jeffrey H. Lang, Sauparna Das

9. Microcombustors for Rotating Machinery
C.M. Spadaccini, I.A. Waitz

Keywords: Engineering, Electronics and Microelectronics, Instrumentation, Energy Technology, Circuits and Systems, Electrical Engineering

Author(s)
Publisher
Springer
Publication year
2009
Language
en
Edition
1
Series
MEMS Reference Shelf
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (PDF)
9780387777474

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