Multi-Wafer Rotating MEMS Machines

1. Introduction to PowerMEMS
Alan H. Epstein

2. System Design Considerations and Device Overview
Alan H. Epstein

3. Materials, Structures and Packaging
S. Mark Spearing

4. Microengine Fabrication
Hanqing Li, Martin Schmidt

5. Fabrication of Microscale Rotating Magnetic Machines
David P. Arnold, Mark G. Allen

6. High-Speed Gas Bearings for Micro-Turbomachinery
Zoltán S. Spakovszky

7. Thermofluidics and Turbomachinery
Stuart A. Jacobson

8. Motors and Generators
Jeffrey H. Lang, Sauparna Das

9. Microcombustors for Rotating Machinery
C.M. Spadaccini, I.A. Waitz

Keywords: Engineering, Electronics and Microelectronics, Instrumentation, Energy Technology, Circuits and Systems, Electrical Engineering