Jackson, Mark J.
Micro and Nanomanufacturing
Table of contents
1. Principles of Micro- and Nanofabrication
2. Microfabrication Using X- ray Lithography
3. Manufacturing High Aspect Ratio Microstructures
4. Meso-Micromachining
5. Mechanical Micromachining
6. Microgrinding
7. Diamond Microcutting Tools
8. Laser Micro- and Nanofabrication
9. Micromachining Using Pulsed Water Droplets
10. Diamond Nanogrinding
11. Nanomachining
12. Micro-and Nanomanufacturing
Keywords: Engineering, Mechanical Engineering, Electronics and Microelectronics, Instrumentation, Manufacturing, Machines, Tools
- Author(s)
- Jackson, Mark J.
- Publisher
- Springer
- Publication year
- 2007
- Language
- en
- Edition
- 1
- Page amount
- 712 pages
- Category
- Technology, Energy, Traffic
- Format
- Ebook
- eISBN (PDF)
- 9780387261324
