Introduction to Focused Ion Beams

1. The Focused Ion Beam Instrument
F. A. Stevie, L. A. Giannuzzi, B. I. Prenitzer

2. Ion - Solid Interactions
Lucille A. Giannuzzi, Brenda I. Prenitzer, Brian W. Kempshall

3. Focused Ion Beam Gases for Deposition and Enhanced Etch
F. A. Stevie, D. P. Griffis, P. E. Russell

4. Three-Dimensional Nanofabrication Using Focused Ion Beams
Takashi Kaito

5. Device Edits and Modifications
Kultaransingh Bobby N. Hooghan

6. The Uses of Dual Beam FIB in Microelectronic Failure Analysis
Becky Holdford

7. High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy
Peter Gnauck, Peter Hoffrogge, M. Schumann

8. FIB for Materials Science Applications - a Review
M. W. Phaneuf

9. Practical Aspects of FIB Tem Specimen Preparation
Ron Anderson, Stanley J. Klepeis

10. FIB Lift-Out Specimen Preparation Techniques
L. A. Giannuzzi, B. W. Kempshall, S. M. Schwarz, J. K. Lomness, B. I. Prenitzer, F. A. Stevie

11. A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method
T. Kamino, T. Yaguchi, T. Hashimoto, T. Ohnishi, K. Umemura

12. Dual-Beam (FIB-SEM) Systems
Richard J. Young, Mary V. Moore

13. Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS)
F. A. Stevie

14. Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy
D. N. Dunn, A. J. Kubis, R. Hull

15. Application of FIB in Combination with Auger Electron Spectroscopy
E. L. Principe

Keywords: Physics, Condensed Matter, Surfaces and Interfaces, Thin Films, Optical and Electronic Materials, Solid State Physics and Spectroscopy