MEMS Vibratory Gyroscopes
Table of contents
1. Fundamentals of Micromachined Vibratory Gyroscopes
2. Introduction
3. Fundamentals of Micromachined Gyroscopes
4. Fabrication Technologies
5. Mechanical Design of MEMS Gyroscopes
6. Electrical Design of MEMS Gyroscopes
2. Structural Approaches to Improve Robustness
7. Linear Multi DOF Architecture
8. Torsional Multi DOF Architecture
9. Distributed Mass Architecture
10. Conclusions and Future Trends
Keywords: Engineering
- Publisher
- Springer
- Publication year
- 2009
- Language
- en
- Edition
- 1
- Series
- MEMS Reference Shelf
- Page amount
- 11 pages
- Category
- Technology, Energy, Traffic
- Format
- Ebook
- eISBN (PDF)
- 9780387095363
