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MEMS Vibratory Gyroscopes

 - MEMS Vibratory Gyroscopes, ebook

95,65€

Ebook, PDF with Adobe DRM
ISBN: 9780387095363
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Table of contents

1. Fundamentals of Micromachined Vibratory Gyroscopes

2. Introduction

3. Fundamentals of Micromachined Gyroscopes

4. Fabrication Technologies

5. Mechanical Design of MEMS Gyroscopes

6. Electrical Design of MEMS Gyroscopes

2. Structural Approaches to Improve Robustness

7. Linear Multi DOF Architecture

8. Torsional Multi DOF Architecture

9. Distributed Mass Architecture

10. Conclusions and Future Trends

Keywords: Engineering

Publisher
Springer
Publication year
2009
Language
en
Edition
1
Series
MEMS Reference Shelf
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (PDF)
9780387095363

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