Perevoschikov, Victor A.
Gettering Defects in Semiconductors
Table of contents
1. Introduction
2. Basic technological processes and defect formation in the components of device structures
3. Effects of defects on electrophysical and functional parameters in semiconducting structures and devices
4. Techniques for high-temperature gettering
5. Physical foundations for low-temperature gettering techniques
DRM-restrictions
Printing: not available
Clipboard copying: not available
Avainsanat: SCIENCE / Chemistry / General SCI013000
- Tekijä(t)
- Perevoschikov, Victor A.
- Skoupov, Vladimir D.
- Julkaisija
- Springer
- Julkaisuvuosi
- 2005
- Kieli
- en
- Painos
- 1
- Kategoria
- Eksaktit luonnontieteet
- Tiedostomuoto
- E-kirja
- eISBN (PDF)
- 9783540294993
