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Perevoschikov, Victor A.

Gettering Defects in Semiconductors

Gettering Defects in Semiconductors

161,20€

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ISBN: 9783540294993
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Table of contents

1. Introduction

2. Basic technological processes and defect formation in the components of device structures

3. Effects of defects on electrophysical and functional parameters in semiconducting structures and devices

4. Techniques for high-temperature gettering

5. Physical foundations for low-temperature gettering techniques

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Keywords: SCIENCE / Chemistry / General SCI013000

Author(s)
 
Publisher
Springer
Publication year
2005
Language
en
Edition
1
Category
Natural Sciences
Format
Ebook
eISBN (PDF)
9783540294993

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