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Jackson, Mark J.

Micro and Nanomanufacturing

Micro and Nanomanufacturing

95,40€

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ISBN: 9780387261324
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Table of contents

1. Principles of Micro- and Nanofabrication

2. Microfabrication Using X- ray Lithography

3. Manufacturing High Aspect Ratio Microstructures

4. Meso-Micromachining

5. Mechanical Micromachining

6. Microgrinding

7. Diamond Microcutting Tools

8. Laser Micro- and Nanofabrication

9. Micromachining Using Pulsed Water Droplets

10. Diamond Nanogrinding

11. Nanomachining

12. Micro-and Nanomanufacturing

Keywords: Engineering, Mechanical Engineering, Electronics and Microelectronics, Instrumentation, Manufacturing, Machines, Tools

Author(s)
Publisher
Springer
Publication year
2007
Language
en
Edition
1
Page amount
712 pages
Category
Technology, Energy, Traffic
Format
Ebook
eISBN (PDF)
9780387261324

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