Electroceramic-Based MEMS

Part A.Applications and Devices

1. MEMS-Based Thin Film and Resonant Chemical Sensors
H. L. Tuller

2. Microactuators Based on Thin Films
R. Maeda, J.J. Tsaur, S.H. Lee, M. Ichiki

3. Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films
P. Muralt

4. Thick-Film Piezoelectric and Magnetostrictive Devices
N.M. White, S.P. Beeby, N.J. Grabham

5. Micromachined Infrared Detectors Based on Pyroelectric Thin Films
P. Muralt

6. RF Bulk Acoustic Wave Resonators and Filters
H.P. Loebl, C. Metzmacher, R.F. Milsom, P. Lok, A. Tuinhout

7. High Frequency Tuneable Devices Based on Thin Ferroelectric Films
S. Gevorgian

8. MEMS for Optical Functionality
S.-G. Kim, G. Barbastathis, H. L. Tuller

Part B.Materials, Fabrication-Technology, and Functionality

9. Ceramic Thick Films for MEMS
R.A. Dorey, R.W. Whatmore

10. Thin Film Piezoelectrics for MEMS
S. Trolier-McKinstry, P. Muralt

11. Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices
O. Auciello, S. Saha, W. Fan, B. Kabius, S. K. Streiffer, D. Y. Kaufman, J. Im, P. Baumann

12. Permittivity, Tunability and Loss in Ferroelectrics for Reconfigurable High Frequency Electronics
A.K. Tagantsev, V.O. Sherman, K.F. Astafiev, J. Venkatesh, N. Setter

13. Microfabrication of Piezoelectric MEMS
J. Baborowski

14. Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics
M. Alexe, C. Harnagea, D. Hesse

15. Low-Cost Patterning of Ceramic Thin Films
C. R. Martin, I. A. Aksay

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Keywords: SCIENCE / Chemistry / General SCI013000